Ion beam services - The total ion implantation solution
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References
 
Decommissioning & REquipment Refurbishment Services
 

From sub-assembly reconditioning to cost saving refurbishment of high value parts and components, IBS offers a wide range of alternative solutions to costly OEM offerings.

 

Electrostatic Chuck Refurbishment

For cost reduction , IBS can provide this new service for 200mm and 300 mm VARIAN VIISta® and E220/E500 tools. Depending on the damages on the ESC, we can propose different level of services to meet your budget expectations at the most effective cost.

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Nanoclean
Nanoclean is the innovative suite of processes and tool developed by IBS to clean and recycle your ceramic and graphite parts.
IBS has an immediate turnkey solution!

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  Ion implanter disks and pads
Why pay for a refurbishment when a dedicated cleaning is enough?
IBS Partial Refurbishment Disk Service – A customized service offered by IBS !

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Bushing and tubes refurbishing
IBS offer a comprehensive repair solution for all ion implanter bushings, accelerator tubes and quadrapole’s. Whether the bushing has been damaged by arcing, scratches or dropped: IBS is able to repair, to enhance or offer a replacement solution.

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Source rebuild

IBS operates 4 sites accross Europe dedicated to the refurbishment of ion implanter assemblies. IBS refurbishes over 2,000 items per month.

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Spill over cup and Si coating

As an alternative to standard exchange or buying a replacement part, IBS can clean and Si recoat the used parts. Thanks to the plasma spray process for thick Si coating, you have now the opportunity to reduce your maintenance costs.

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For more details, please contact us: information@ion-beam-services.fr

 
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Spindle drive
IBS offers a full worldwide repair/refurbish service for ferroseal units and subsystems.
IBS also has a solution to enhance your spindle drive.

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For more details, please contact us: information@ion-beam-services.fr
 
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