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New Foundry Ion Implant Services
March 2012
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The new 200mm Medium current Implant service, with enhanced capabilities handles implantation of various wafer sizes using dedicated carriers of up to 750keV (dependent on species). This new service allows thin wafer including TAIKO© wafers (down to 60µm thick) utilising a specially developed automated handling system. This service is also available for 150mm wafers.
New exotic species are now available: Cesium (Cs implant is for used for Nchannel MOS) and Yttrium. |
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New ESC Test Facility
March 2012
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As part of the IBS ESC (Electro Static Clamps) refurbishment service, we have developed a new test system that allows the ESC to be fully tested after refurbishment under the conditions seen in a production environment. These in situ tests are available for the following ESC; VIISta 200mm & 300mm, Varian E500 150mm & 200mm and Axcelis NV8200 150mm & 200mm. For more details about ESC refurbishment services...
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New Upgrade for Handling of Thin Wafers on Axcelis NV8200P Series
March 2012
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IBS are now able to offer an upgrade for the Axcelis NV8200P series Implanter design specifically to allow the system to carry out full automatic handling of 150mm and 200mm TAIKO© wafers. |
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IBS will be present at the following events
Spring 2012
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Semicon Russia
ExpoCenter, Moscow, Russia
May 15-16, 2012
Please visit IBS on booth 420
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IIT 2012 – 19th International Conference on Ion Implantation Technology
Congress Center, Valladolid, Spain
June 25-29, 2012
IBS as a sponsor of this conference, will also have a booth and will co-chair the event.
For more details : http://www.iit2012.net/
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