Spare parts supply

Maintaining semiconductor equipment is an expensive
operation, and consumables and non-consumables
utilize a major part of any wafer fab’s maintenance budget.

IBS has developed parts and services that offer a cost effective solution to maintaining semiconductor equipment. We offer a comprehensive line of both original parts and reverse engineered parts for all common makes and models of Ion Implanters. Manufacturered to the same tolerances of the original OEM parts you can rely on our products to deliver the same performance but at a reduced cost.



IBS has developed a full range of retrofits & upgrades
with the following objectives:

> Productivity & reliability improvement
> Cost saving
> Tool monitoring for fluids, gas, etc…
> Tool enhancement for new process
> Obsolescence management

Most of these improvements are already implemented in the IBS implanters.


To meet semiconductor manufacturers’ needs for high-performance,
maximum predictability, and low risk equipment, IBS’s equipment
refurbishment business provides refurbished legacy products.

Offerings include:
  • AXCELIS/EATONNV10-80/160
    NV6200 series
    NV8200 Series
    GSD series
    xR series
    Quantum series
  • VARIANLegacy tools;
    DF, 350D
    E220/E500 series
  • IBS works with the following process:

    > Onsite audit of the different key parameters that will influence on the work
    to be done (equipment, facilities, expertise of the implant team, etc…)
    > Proposal approval
    > Decommissioning of the system
    > Facilities checks and upgrade if necessary
    > Equipment installation
    > Hook-up
    > Tool qualification with standard recipe (special recipes upon request)

    IBS field service team offers a wide range of knowledge,
    gained from 30 years of experience in the field of ion Implantation,
    to help customers optimize their system's performance and reduce costs

    IBS flexible support program
    offers customized support packages for on-call labour and parts management. With offices in Europe and Asia, IBS has the ability to keep quality parts and service personnel close-by to help manage your installed base.
    Onsite support program is possible
    Our commissioning engineers are dedicated to helping you achieve your system qualification goals and will help you to manage a profitable usage of your tool