This high productivity tool can be configured with up to 3 chambers, and:

• allows high throughput (180 w/h)or
• can integrate complementary processes.

Designed for high reliability and low cost of ownership, PULSION HP is configured on 300 mm base with 200 mm compatibility.
Its small footprint (up to 9 m² with 3 chambers) combined with the possibility to install up to 6 gas lines (SDS, High pressure, uptime compatible) makes PULSION HP the ideal tool for new advanced technologies.