Ion beam services - The total ion implantation solution
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Ion implanter
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Plasma immersion implantation
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Ion implantation
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References
  
 

 

IBS offers Plasma Immersion Ion Implant services to address capacities, R&D or process investigation needs:

  • USJ,
  • high k,
  • polysilicon/3D/Trench doping,
  • solar cells,
  • flat panels or
  • power components.

By combining PIII and laser annealing, IBS offers Room Temperature Doping as well.

For more details about our ion implantation capacities, please see our relevant page.

 
     

 
 

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