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IBS offers a wide range of upgrade kits in order to modernize and optimize your existing equipment.
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IHC (Indirect Heated Cathode) for Varian VIISion series
For your cost reduction requirements, IBS has developped an exclusive retrofit :
the conversion of dual filament Bernas source to Indirect Heated Cathode on VIISion tools (200 and 300 mm).
For more details, please contact us: information@ion-beam-services.fr |
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Gas box / Uptime
IBS can refurbish your corroded gas lines, retrofit the line to access to latest technologies of gas delivery such as SDS® or Uptime® or to integrate additional gas lines.
For more details, please contact us: information@ion-beam-services.fr |
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