Ion beam services - The total ion implantation solution
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References
 
Decommissioning & REquipment Refurbishment Services
 

From sub-assemblies standard reconditioning to cost saving refurbishments of high value parts and components, IBS offers a wide range of alternative solutions to costly market available operations.

 

Electrostatic Chuck Refurbishment

For your cost reduction policy, IBS proposes this new service adressed to 200mm and 300 mm VARIAN VIISta® and E220/E500 tools. According to the damages on the ESC, we propose different level of services to meet your budget expectations at the most effective cost.

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Nanoclean
Nanoclean is the novative suite of processes and tool developed by IBS to clean and recycle your implanter ceramic and graphite parts.
For your cost reduction policy: once again IBS has the immediate turnkey solution!

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  Ion implanter disks and pads
Why paying for a whole refurbishment when a dedicated cleaning is enough?
IBS Partial Refurbishment Disk Service – The customized service Made in IBS !

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Bushing and tubes refurbishment
IBS offer a comprehensive repair solution for all ion implanter bushings, accelerator tubes, quadrapole’s. Whether the bushing has been damaged by arcing, scratches, dropped: IBS is able to repair, to enhance or offer a replacement solution.

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Source rebuild

IBS operates 4 sites accross Europe dedicated to the refurbishment of ion implanter assemblies, that refurbish over 2,000 items per month.

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Spill over cup and Si coating

As an alternative to standard exchange or new part buying, IBS propose to clean and Si recoat the used parts. Thanks to the plasma spray process for thick Si coating, you have now the opportunity to reduce your maintenance costs.

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For more details, please contact us: information@ion-beam-services.fr

 
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Spindle drive
IBS offers a full worldwide repair/refurbish service for magnetic liquid feedthroughs and subsystems.
You also have the opportunity when selecting IBS to enhance your spindle drive.

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For more details, please contact us: information@ion-beam-services.fr
 
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