This high productivity tool with the possibility of 3 chambers:

• allows high throughput (180 w/h)or
• can integrate complementary processes.

Designed for high reliability and low maintenance costs, PULSION HP is configured on 300 mm base with 200 mm compatibility.
Its small footprint (up to 9 m² with 3 chambers) combined with the possibility to install up to 6 gas lines (SDS, High pressure, uptime compatible) makes PULSION HP the ideal tool for new technologies Fab.