Ion beam services - The total ion implantation solution
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Ion implantation
Individuals process steps
Component and prototyping

References
 
Individuals process steps
 

 

From development phase to production: IBS is your partner for your ramping up volumes.
Deposit your thin films with IBS: sputtering, evaporation, PECVD, from small samples to 8" wafers.
IBS offers a broad range of etching technologies: wet, plasma, ion beam, TMAH (Si etching CMOS compatible).
In itself, or combined with deposition/etching steps, you can use our photolithography capacities:
For your annealing or thermal oxidation processes, you can also use IBS: furnace, RTA, laser…

Remember: you can use IBS to prototype and manufacture a full component.

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  Thin films
  Etching
  Photolithography
  Annealing and thermal oxidation
 


 
     
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