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IBS has an ion implanter solution for 4”, 5” and 6” (combining reliability and low cost of ownership), tailored to your needs.
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IMC-200P Ion implanter series
IMC-200P Fully automated solution for today’s volume production on 4’’, 5’’, 6’’ substrates.
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IMC-200RD Ion implanter series
IMC-200RD Implanter specifically designed for your R&D and unconventional ion implant. Each IMC-200RD is unique and tailored to your needs thanks to its high versatility.
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